Through Veeco’s MBE engineering expertise, design optimizations have made the GENxplor platform a capable research system that is tailored to meet the unique challenges of compound semiconductor material R&D. Its efficient single-frame design combines all vacuum hardware with on-board electronics to make it up to 40% smaller than other MBE systems, it is reckoned, saving valuable lab space. The GENxplor system deposits high-quality epitaxial layers on substrates up to 3-inch in diameter. “The reliable design and superior technology of the GENxplor system will no doubt strengthen our efforts to drive significant advancements in meta-material and long-wavelength photonics research.” “As a researcher familiar with the performance of Veeco’s GENxplor R&D system, this was an easy decision to add this system to our research facility,” says Law. Penn State purchased the GENxplor system for its capability to produce exceptional quality epitaxial films, according to professor Stephanie Law. 11 August 2022 Penn State orders another Veeco GENxplor R&D MBE system for opto materials researchĮpitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has received an order from the Pennsylvania State University for its GENxplor R&D molecular beam epitaxy (MBE) system, to be used to enable the epitaxial growth of high-quality III-V compound semiconductor materials for applications including lasers and next-generation infrared plasmonic meta-materials.
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